Merlin SEM

Carl Zeiss Merlin SEM

Our Carl Zeiss Merlin SEM is a high-resolution Field Emission Scanning Electron Microscope (FE-SEM) designed for low-voltage imaging of delicate samples with resolution better than one nanometer. The Merlin has several low-noise backscatter and secondary electron detectors, a novel charging compensation mode, and has become our primary tool for studying soft materials samples such as polymers, nanoparticles, and active biological materials such as patterned silicon nanowires. An Oxford Ultim Max 100 EDS system with AzetcLive enables ultrafast elemental characterization and mapping.

Specifications

• Probe continuously adjustable from 10pA to 40nA
• 0.9 nm resolution at 15kV
• 1.6 nm resolution at 1kV
• Detectors: In-Lens SE, EsB, AsB, SE2
• Oxford Ultim Max 100 EDS system
• 80mm Airlock
• GIS Charge Compensator (N2)
• IBSS GV10x DS Asher
• Spicer SC20 EMF cancellation

GeminiSEM 560

Carl Zeiss GeminiSEM 560 (Coming Soon!)

Designed for ultra-low-kV imaging with sub-nm resolution

Specifications

• 0.5 nm resolution at 15 kV
• 0.8 nm resolution at 1 kV
• 1.0 nm resolution at 500 V
• Detectors: InLens SE, EsB, ETSE, C2D, aBSD, CL
• NanoVP and VP modes
• Oxford Ultim Max 100 EDS system
• Oxford Ultim Extreme EDS system
• Insert sample transfer stage
• IBSS GV10x DS Asher
• Spicer SC24 EMF cancellation