Surface Preparation:

The MPML is capable of preparing a variety of engineered surfaces. For surface cleaning, we have an ozone surface cleaner and a UV-Ozone surface decontaminator. We also have a South Bay Technology RIE-2000 Reactive Ion Etcher for etching surfaces by He, CF4, O2 and SF6.

The lab is also equipped for wire bonding (K&S), heat treatment (atmosphere-controlled furnaces), mechanical processing, and chemical processing, as well as sample surface cleaning (ozone and UV cleaners).

Photolithography:

The MPML has home-made near-UV and deep-UV exposure systems for photolithography that can create patterns down to 1µm feature sizes. An Olympus optical microscope with long working distance objectives and a DP72 CCD camera is used for characterization. Spin-coating systems, chemical hoods, and ultrasonic baths are also available in a clean room setting.

Sample Cutting-Polishing

We recently added a ProtoMAX waterjet cutter, a ULS VL4.60 Laser Cutter, and several 3D printear for digital fabrication and rapid prototpying. In addition, we also have a South Bay Technology diamond wheel cutter, a Buehler ECOMET 3 and a MINIMET 1000 Grinder-Polisher.

Plasma Etch PE-100LF

200W Plasma etcher & cleaning system with oxygen and argon plasmas

Specifications

• 200W Etching system
• Two gases: Argon & Oxygen
• Dry vacuum pump

Southbay RIE2000

Available plasmas include He, CF4, O2 and SF6.

Specifications

• Available gases: He, CF4, O2, and SF6

South Bay 560 Diamond Saw

Low speed diamond wheel saw for sample slicing.

Grinder/Polisher – Buehler ECOMET3

Our general use grinder / polisher for use with a variety of materials

UV Exposure System

Near and deep UV exposure systems for optical lithography

Specifications

• 75nm light source
• 248nm light source

Cressington 208HR Sputter Coater

Cressington 208 HR sputter coater with Pd/Pt target for electron microscopy sample preparation

Specifications

• Platinum/Palladium
• Gold
• Silver
• Nickel

Leica ACE600 Coater

Sputter coater and carbon coater for SEM sample prep

Ozone and UV Surface Cleaners

K&S 4526 Wedge Bonder

Semi-automatic wire bonder with tips for gold and aluminum wire

Specifications

• Gold wire
• Aluminum wire